zhpsЖурнал прикладной спектроскопииZhurnal Prikladnoii Spektroskopii0514-7506B. I. Stepanov Institute of Physics of the National Academy of Scienceszhps-1142Research ArticleСтатьиВЫСОКОЭФФЕКТИВНЫЙ ПЕРЕСТРАИВАЕМЫЙ СЕНСОР ПОКАЗАТЕЛЯ ПРЕЛОМЛЕНИЯ НА ОСНОВЕ ВЫСОКОКАЧЕСТВЕННОГО ГРАФЕНАTUNABLE REFRACTIVE INDEX SENSOR MADE USING GRAPHENE WITH A HIGH FIGURE OF MERITWangZ.WangZ.

Ханчжоу

Zhen Wang

Hangzhou

LiX.LiX.

Ханчжоу

Xia Li

Hangzhou

LinH.LinH.

Ханчжоу

Hongya Lin

Hangzhou

YangD.YangD.

Ханчжоу

Dongxu Yang

Hangzhou

WangY.WangY.

Ханчжоу

Yinqiu Wang

Hangzhou

LuS.LuS.

Ханчжоу

Saiqun Lu

Hangzhou

XiaoB.XiaoB.

Ханчжоу

Binggang Xiao

Hangzhou

bgxiao@cjlu.edu.cnКолледж информационной инженерии Китайского университета ЦзилянKey Laboratory of Electromagnetic Wave Information Technology and Metrology of Zhejiang Province, College of Information Engineering at China Jiliang UniversityКолледж туризма ЧжэцзянTourism College of ZhejiangЧжэцзянский университет водных ресурсов и электроэнергииZhejiang University of Water Resources and Electric Power202226092022895719725Copyright © Wang Z., Li X., Lin H., Yang D., Wang Y., Lu S., Xiao B., 20222022Wang Z., Li X., Lin H., Yang D., Wang Y., Lu S., Xiao B.Wang Z., Li X., Lin H., Yang D., Wang Y., Lu S., Xiao B.Данная работа распространяется под лицензией Creative Commons Attribution 4.0.This work is licensed under a Creative Commons Attribution 4.0 License.https://zhps.ejournal.by/jour/article/view/1142

Разработан сенсор показателя преломления, состоящий из графенового волновода и графенового эллиптического резонатора, работающего в среднем ИК-диапазоне. Производительность можно регулировать в режиме реального времени, прикладывая напряжение смещения к паттернам графена. Чувствительность предлагаемого датчика 2850/отн. ед, показатель качества 633. Благодаря высоким чувствительности и показателю качества датчик может применяться для обнаружения различных газов.

Plasmonic effects can be used in high sensitivity sensors, which have attracted widespread attention. However, most of the previously reported refractive index sensors can no longer be adjusted once fabricated, and their figure of merit (FOM) is undesirable. Concerning this, we propose a refractive index sensor consisting of a graphene waveguide and a graphene elliptical cavity working in the mid-infrared range. Its performance can be adjusted in real time by applying a bias voltage to the graphene patterns. The sensitivity of the proposed sensor can reach 2850/refractive index unit and FOM up to 633, respectively. Owing to its excellent sensing properties of high sensitivity and high FOM, the proposed sensor can be applied in gas sensing.

графеновый волноводопределение газавысокая добротностьсредний ИК-диапазонgraphene waveguidegas sensinghigh figure of meritmid-infrared rangeThis work was supported by the 2021 Zhejiang Provincial Natural Science Foundation under Grant No. LY21F010012, in part by the 2018 Zhejiang Provincial Natural Science Foundation under Grant No. Y18E070005 and in part by the Zhejiang Science and Technology Department Public Welfare Project under Grant No. GH18F010001.ReferencesF. H. L. Koppens, D. E. Chang, G. D. A. F. Javier, Nano Lett., 11, No. 8, 3370 (2011).F. H. L. Koppens, D. E. Chang, G. D. A. F. Javier, Nano Lett., 11, No. 8, 3370 (2011).A. S. Rodin, Z. Fei, A. S. Mcleod, et al., Physics (2016).A. S. Rodin, Z. Fei, A. S. Mcleod, et al., Physics (2016).L. Ju, B. Geng, J. Horng, et al., Nature Nanotech., 6, No. 10, 630 (2011).L. Ju, B. Geng, J. Horng, et al., Nature Nanotech., 6, No. 10, 630 (2011).D. B. Farmer, D. Rodrigo, T. Low, et al., Nano Lett., 15, No. 4, 2582–2587 (2015).D. B. Farmer, D. Rodrigo, T. Low, et al., Nano Lett., 15, No. 4, 2582–2587 (2015).P. Li, T. Wang, H. Böckmann, et al., Nano Lett., 14, No. 8, 4400 (2014).P. Li, T. Wang, H. Böckmann, et al., Nano Lett., 14, No. 8, 4400 (2014).B. Vasić, G. Isić, R. Gajić, J. Appl. Phys., 113, No. 1, 21556 (2013).B. Vasić, G. Isić, R. Gajić, J. Appl. Phys., 113, No. 1, 21556 (2013).Y. Li, H. Yan, D. B. Farmer, et al. Nano Lett., 14, No. 3, 1573 (2014).Y. Li, H. Yan, D. B. Farmer, et al. Nano Lett., 14, No. 3, 1573 (2014).W. Wei, J. Nong, Y. Zhu, et al., Opt. Commun. (2016).W. Wei, J. Nong, Y. Zhu, et al., Opt. Commun. (2016).J. N. Anker, W. P. Hall, O. Lyandres, et al., Nanosci. Technol.: A Collection Rev. from Nature J., 308–319 (2010).J. N. Anker, W. P. Hall, O. Lyandres, et al., Nanosci. Technol.: A Collection Rev. from Nature J., 308–319 (2010).L. A. Falkovsky, Phys. Usp., 51, No. 9, 887–897 (2008).L. A. Falkovsky, Phys. Usp., 51, No. 9, 887–897 (2008).S. A. Maier, Plasmonics: Fundamentals and Applications, Springer Science & Business Media (2007).S. A. Maier, Plasmonics: Fundamentals and Applications, Springer Science & Business Media (2007).V. G. Kravets, R. Jalil, Y. J. Kim, et al., Sci. Reports, 4, 5517 (2014).V. G. Kravets, R. Jalil, Y. J. Kim, et al., Sci. Reports, 4, 5517 (2014).O. Salihoglu, S. Balci, C. Kocabas, Appl. Phys. Lett., 100, No. 21, 213110 (2012).O. Salihoglu, S. Balci, C. Kocabas, Appl. Phys. Lett., 100, No. 21, 213110 (2012).P. R. Griffiths, J. A. D. Haseth, Fourier Transform Infrared Spectrometry, 2nd Ed., Proteomics (2007).P. R. Griffiths, J. A. D. Haseth, Fourier Transform Infrared Spectrometry, 2nd Ed., Proteomics (2007).D. Rodrigo, O. Limaj, D. Janner, et al., Mid-Infrared Plasmonic Biosensing with Graphene. Science, 349 (6244), 165–168 (2015).D. Rodrigo, O. Limaj, D. Janner, et al., Mid-Infrared Plasmonic Biosensing with Graphene. Science, 349 (6244), 165–168 (2015).J. Homola, S. S. Yee, G. Gauglitz, Sens. Actuat. B: Chem., 54, No. 1–2, 3–15 (1999).J. Homola, S. S. Yee, G. Gauglitz, Sens. Actuat. B: Chem., 54, No. 1–2, 3–15 (1999).S. Law, V. Podolskiy, D. Wasserman, Nanophotonics, 2, No. 2, 103–130 (2013).S. Law, V. Podolskiy, D. Wasserman, Nanophotonics, 2, No. 2, 103–130 (2013).J. M. Bingham, J. N. Anker, L. E. Kreno, et al., J. Am. Chem. Soc., 132, No. 49, 17358–17359 (2010).J. M. Bingham, J. N. Anker, L. E. Kreno, et al., J. Am. Chem. Soc., 132, No. 49, 17358–17359 (2010).M. W. Sigrist, R. Bartlome, D. Marinov, et al., Appl. Phys. B, 90, No. 2, 289–300 (2008).M. W. Sigrist, R. Bartlome, D. Marinov, et al., Appl. Phys. B, 90, No. 2, 289–300 (2008).X. Yan, T. Wang, X. Han, et al., Plasmonics, 1–7 (2016).X. Yan, T. Wang, X. Han, et al., Plasmonics, 1–7 (2016).T. Wenger, G. Viola, J. Kinaret, et al., Materials, 4, No. 2 (2017).T. Wenger, G. Viola, J. Kinaret, et al., Materials, 4, No. 2 (2017).R. E. Peale, J. W. Cleary, W. R. Buchwald, et al., Proc. SPIE, The Int. Soc. Opt. Eng., 767306 (95), 730–734 (2010).R. E. Peale, J. W. Cleary, W. R. Buchwald, et al., Proc. SPIE, The Int. Soc. Opt. Eng., 767306 (95), 730–734 (2010).B. Wang, G. P. Wang, Appl. Phys. Lett., 87, No. 1, 013107(1–3) (2005).B. Wang, G. P. Wang, Appl. Phys. Lett., 87, No. 1, 013107(1–3) (2005).L. A. Falkovsky, J. Exp. Theor. Phys., 106, No. 3, 575–580 (2008).L. A. Falkovsky, J. Exp. Theor. Phys., 106, No. 3, 575–580 (2008).B. Ruan, Q. You, J. Zhu, et al., IEEE Sensors J., 18, 7436–7441 (2018).B. Ruan, Q. You, J. Zhu, et al., IEEE Sensors J., 18, 7436–7441 (2018).D. Wu, J. Tian, L. Li, et al., Opt. Commun., 412, 41–48 (2018).D. Wu, J. Tian, L. Li, et al., Opt. Commun., 412, 41–48 (2018).G. W. Hanson, J. Appl. Phys., 103, No. 6, 064302 (2008).G. W. Hanson, J. Appl. Phys., 103, No. 6, 064302 (2008).A. Moreau, C. Ciracì, et al., Nature, 492(7427), 86–89 (2012).A. Moreau, C. Ciracì, et al., Nature, 492(7427), 86–89 (2012).B. Zhu, G. Ren, S. Zheng, et al., Opt. Express, 21, No. 14, 17089–17096 (2013).B. Zhu, G. Ren, S. Zheng, et al., Opt. Express, 21, No. 14, 17089–17096 (2013).X. Wang, T. He, M. A. Mohammad, et al., Nat. Commun., 6, Article No. 7767 (2015).X. Wang, T. He, M. A. Mohammad, et al., Nat. Commun., 6, Article No. 7767 (2015).D. Yadav, S. B. Tombet, T. Watanabe, et al., Materials, 3, No. 4, 045009 (2016).D. Yadav, S. B. Tombet, T. Watanabe, et al., Materials, 3, No. 4, 045009 (2016).X. Binggang, T. Shengjun, A. Fyffe, Z. Shi, Opt. Express, 28, 4048–4057 (2020).X. Binggang, T. Shengjun, A. Fyffe, Z. Shi, Opt. Express, 28, 4048–4057 (2020).Y. Zhang, M. Cui, J. Electron. Mater., 48, No. 2, 1005–1010 (2019).Y. Zhang, M. Cui, J. Electron. Mater., 48, No. 2, 1005–1010 (2019).

The authors declare that there are no conflicts of interest present.