zhpsЖурнал прикладной спектроскопииZhurnal Prikladnoii Spektroskopii0514-7506B. I. Stepanov Institute of Physics of the National Academy of Scienceszhps-1431Research ArticleАННОТАЦИИ АНГЛОЯЗЫЧНЫХ СТАТЕЙABSTRACTS ENGLISH-LANGUAGE ARTICLESЭллипсометрический подход в изучении изменений показателя преломления и коэффициента экстинкции тонкой однослойной пленки меди при термическом отжигеVariation in Refractive Index and Extinction Coefficient of a Very Thin Copper Film by Thermal Annealing: an Ellipsometric ApproachSomakumarА. K.SomakumarA. K.

Коттаям, Керала

Ajeesh Kumar Somakumar

Kottayam, Kerala

infinityphotons@gmail.comШкола прикладной физики Университета Махатмы ГандиSchool of Pure and Applied Physics, Mahatma Gandhi University202325112023905803803Copyright © Somakumar А.K., 20232023Somakumar А.K.Somakumar A.K.Данная работа распространяется под лицензией Creative Commons Attribution 4.0.This work is licensed under a Creative Commons Attribution 4.0 License.https://zhps.ejournal.by/jour/article/view/1431

Исследованы оптические характеристики тонкой поглощающей однослойной пленки меди при различных температурах отжига. Спектроскопическая эллипсометрия применена в качестве эффективного инструмента для точной настройки оптических констант тонких пленок, особенно для достижения конкретных значений показателя преломления (n) и коэффициента экстинкции (k). Измерение и анализ термически осажденной на стеклянную подложку тонкой однослойной пленки меди проведены для спектроскопического эллипсометра.

A pure experiment-based work was conducted to investigate the optical characteristics of a thin absorbing single-layer copper film at various annealing temperatures. The study also systematically examined the utilization of spectroscopic ellipsometry as an effective tool for fine-tuning the optical constants of thin films, particularly for achieving specific refractive index (n) and extinction coefficient (k) values. The measurement and analysis involved a thermally deposited thin nano-sized single-layer copper film on a glass substrate, along with a spectroscopic ellipsometer.

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The authors declare that there are no conflicts of interest present.