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<article article-type="research-article" dtd-version="1.3" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xml:lang="ru"><front><journal-meta><journal-id journal-id-type="publisher-id">zhps</journal-id><journal-title-group><journal-title xml:lang="ru">Журнал прикладной спектроскопии</journal-title><trans-title-group xml:lang="en"><trans-title>Zhurnal Prikladnoii Spektroskopii</trans-title></trans-title-group></journal-title-group><issn pub-type="ppub">0514-7506</issn><publisher><publisher-name>B. I. Stepanov Institute of Physics of the National Academy of Sciences</publisher-name></publisher></journal-meta><article-meta><article-id custom-type="elpub" pub-id-type="custom">zhps-1699</article-id><article-categories><subj-group subj-group-type="heading"><subject>Research Article</subject></subj-group><subj-group subj-group-type="section-heading" xml:lang="ru"><subject>СПЕКТРОСКОПИЯ ТВЕРДЫХ ТЕЛ</subject></subj-group><subj-group subj-group-type="section-heading" xml:lang="en"><subject>SPECTROSCOPY OF SOLIDS</subject></subj-group></article-categories><title-group><article-title>Структурные, оптические и фотоэлектрические свойства кремния, имплантированного ионами индия и сурьмы и подвергнутого импульсному отжигу</article-title><trans-title-group xml:lang="en"><trans-title>Structural, optical, and photoelectric properties of silicon implanted  with indium and antimony ions and subjected to pulsed annealing</trans-title></trans-title-group></title-group><contrib-group><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Баталов</surname><given-names>Р. И.</given-names></name><name name-style="western" xml:lang="en"><surname>Batalov</surname><given-names>R. I.</given-names></name></name-alternatives><bio xml:lang="ru"><p>Казань</p></bio><bio xml:lang="en"><p>Kazan</p></bio><email xlink:type="simple">batalov@kfti.knc.ru</email><xref ref-type="aff" rid="aff-1"/></contrib><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Базаров</surname><given-names>В. В.</given-names></name><name name-style="western" xml:lang="en"><surname>Bazarov</surname><given-names>V. V.</given-names></name></name-alternatives><bio xml:lang="ru"><p>Казань</p></bio><bio xml:lang="en"><p>Kazan</p></bio><xref ref-type="aff" rid="aff-1"/></contrib><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Нуждин</surname><given-names>В. И.</given-names></name><name name-style="western" xml:lang="en"><surname>Nuzhdin</surname><given-names>V. I.</given-names></name></name-alternatives><bio xml:lang="ru"><p>Казань</p></bio><bio xml:lang="en"><p>Kazan</p></bio><xref ref-type="aff" rid="aff-1"/></contrib><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Валеев</surname><given-names>В. Ф.</given-names></name><name name-style="western" xml:lang="en"><surname>Valeev</surname><given-names>V. F.</given-names></name></name-alternatives><bio xml:lang="ru"><p>Казань</p></bio><bio xml:lang="en"><p>Kazan</p></bio><xref ref-type="aff" rid="aff-1"/></contrib><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Новиков</surname><given-names>Г. А.</given-names></name><name name-style="western" xml:lang="en"><surname>Novikov</surname><given-names>H. A.</given-names></name></name-alternatives><bio xml:lang="ru"><p>Казань</p></bio><bio xml:lang="en"><p>Kazan</p></bio><xref ref-type="aff" rid="aff-1"/></contrib><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Шустов</surname><given-names>В. А.</given-names></name><name name-style="western" xml:lang="en"><surname>Shustov</surname><given-names>V. A.</given-names></name></name-alternatives><bio xml:lang="ru"><p>Казань</p></bio><bio xml:lang="en"><p>Kazan</p></bio><xref ref-type="aff" rid="aff-1"/></contrib><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Галкин</surname><given-names>К. Н.</given-names></name><name name-style="western" xml:lang="en"><surname>Galkin</surname><given-names>K. N.</given-names></name></name-alternatives><bio xml:lang="ru"><p>Владивосток</p></bio><bio xml:lang="en"><p>Vladivostok</p></bio><xref ref-type="aff" rid="aff-2"/></contrib><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Чистохин</surname><given-names>И. Б.</given-names></name><name name-style="western" xml:lang="en"><surname>Chistokhin</surname><given-names>I. B.</given-names></name></name-alternatives><bio xml:lang="ru"><p>Новосибирск</p></bio><bio xml:lang="en"><p>Novosibirsk</p></bio><xref ref-type="aff" rid="aff-3"/></contrib><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Комаров</surname><given-names>Ф. Ф.</given-names></name><name name-style="western" xml:lang="en"><surname>Komarov</surname><given-names>F. F.</given-names></name></name-alternatives><bio xml:lang="ru"><p>Минск</p></bio><bio xml:lang="en"><p>Minsk</p></bio><xref ref-type="aff" rid="aff-4"/></contrib><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Мильчанин</surname><given-names>О. В.</given-names></name><name name-style="western" xml:lang="en"><surname>Milchanin</surname><given-names>O. V.</given-names></name></name-alternatives><bio xml:lang="ru"><p>Минск</p></bio><bio xml:lang="en"><p>Minsk</p></bio><xref ref-type="aff" rid="aff-4"/></contrib><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Пархоменко</surname><given-names>И. Н.</given-names></name><name name-style="western" xml:lang="en"><surname>Parkhomenko</surname><given-names>I. N.</given-names></name></name-alternatives><bio xml:lang="ru"><p>Минск</p></bio><bio xml:lang="en"><p>Minsk</p></bio><xref ref-type="aff" rid="aff-5"/></contrib></contrib-group><aff-alternatives id="aff-1"><aff xml:lang="ru"><institution>Казанский физико-технический институт им. Е. К. Завойского, Федеральный исследовательский центр “Казанский научный центр РАН”</institution></aff><aff xml:lang="en"><institution>Zavoisky Kazan Physical-Technical Institute, Federal Research Center “Kazan Scientific Center of Russian Academy of Sciences”</institution></aff></aff-alternatives><aff-alternatives id="aff-2"><aff xml:lang="ru"><institution>Институт автоматики и процессов управления ДВО РАН</institution></aff><aff xml:lang="en"><institution>Institute of Automation and Control Processes, Far Eastern Branch, Russian Academy of Sciences</institution></aff></aff-alternatives><aff-alternatives id="aff-3"><aff xml:lang="ru"><institution>Институт физики полупроводников им. А. В. Ржанова СО РАН</institution></aff><aff xml:lang="en"><institution>A. V. Rzhanov Institute of Semiconductor Physics, Siberian Branch, Russian Academy of Sciences</institution></aff></aff-alternatives><aff-alternatives id="aff-4"><aff xml:lang="ru"><institution>Институт прикладных физических проблем имени А. Н. Севченко  &#13;
Белорусского государственного университета</institution></aff><aff xml:lang="en"><institution>A. N. Sevchenko Institute of Applied Physical Problems of Belarusian State University</institution></aff></aff-alternatives><aff-alternatives id="aff-5"><aff xml:lang="ru"><institution>Белорусский государственный университет</institution></aff><aff xml:lang="en"><institution>Belarusian State University</institution></aff></aff-alternatives><pub-date pub-type="collection"><year>2024</year></pub-date><pub-date pub-type="epub"><day>15</day><month>11</month><year>2024</year></pub-date><volume>91</volume><issue>6</issue><fpage>804</fpage><lpage>812</lpage><permissions><copyright-statement>Copyright &amp;#x00A9; Баталов Р.И., Базаров В.В., Нуждин В.И., Валеев В.Ф., Новиков Г.А., Шустов В.А., Галкин К.Н., Чистохин И.Б., Комаров Ф.Ф., Мильчанин О.В., Пархоменко И.Н., 2024</copyright-statement><copyright-year>2024</copyright-year><copyright-holder xml:lang="ru">Баталов Р.И., Базаров В.В., Нуждин В.И., Валеев В.Ф., Новиков Г.А., Шустов В.А., Галкин К.Н., Чистохин И.Б., Комаров Ф.Ф., Мильчанин О.В., Пархоменко И.Н.</copyright-holder><copyright-holder xml:lang="en">Batalov R.I., Bazarov V.V., Nuzhdin V.I., Valeev V.F., Novikov H.A., Shustov V.A., Galkin K.N., Chistokhin I.B., Komarov F.F., Milchanin O.V., Parkhomenko I.N.</copyright-holder><license xml:lang="ru" license-type="creative-commons-attribution" xlink:href="https://creativecommons.org/licenses/by/4.0/" xlink:type="simple"><license-p>Данная работа распространяется под лицензией Creative Commons Attribution 4.0.</license-p></license><license xml:lang="en" license-type="creative-commons-attribution" xlink:href="https://creativecommons.org/licenses/by/4.0/" xlink:type="simple"><license-p>This work is licensed under a Creative Commons Attribution 4.0 License.</license-p></license></permissions><self-uri xlink:href="https://zhps.ejournal.by/jour/article/view/1699">https://zhps.ejournal.by/jour/article/view/1699</self-uri><abstract><p>Для синтеза в приповерхностной области монокристалла кремния слоя узкозонного антимонида индия (InSb) проведена последовательная высокодозная имплантация кремния ионами In+ и Sb+ с энергией 30 кэВ и дозой 2 ∙ 1016 см–2. Отжиг имплантированных слоев Si:(In+Sb) в жидкофазном режиме проведен мощным импульсным (~100 нс) ионным пучком (C+/H+) с энергией 300 кэВ и плотностью энергии импульса 1.0 Дж/см2. Расчет суммарного глубинного профиля концентрации имплантированных атомов In и Sb с учетом распыления показал их максимальную концентрацию 40 ат.% на глубине ~20 нм. Методом резерфордовского обратного рассеяния ионов He+ обнаружена сегрегация примесных атомов к поверхности Si в результате импульсного отжига. Спектры рентгеновской дифракции в скользящих лучах и комбинационного рассеяния света указывают на формирование фазы InSb с уровнем деформации растяжения 0.6—0.7 %. С помощью оптических  ИК-спектров оценена концентрация электронов в слое 2 ∙ 1020 см–3 за счет донорной примеси Sb и показано образование интенсивной полосы поглощения при 3.85 мкм. Измерения фотоотклика на диодной меза-структуре при 300 К показали сдвиг края фоточувствительности до 1240 нм по сравнению с типовым Si-фотодиодом ФД-24. </p></abstract><trans-abstract xml:lang="en"><p>In order to synthesize a layer of narrow-gap indium antimonide (InSb) in the near-surface region of a Si single crystal, sequential high-dose implantation of Si with In+ and Sb+ ions with an energy of 30 keV and  a dose of 2×1016 cm–2 was carried out. Annealing of implanted Si:(In+Sb) layers in the liquid phase regime was carried out with a powerful pulsed (~100 ns) ion beam (C+/H+) with energy of 300 keV and pulse energy density of 1.0 J/cm2. Calculation of the total depth profile of the concentration of implanted In and Sb atoms taking into account ion sputtering showed their maximum concentration of 40 at.% at a depth of about 20 nm. Using the Rutherford backscattering of He+ ions, the segregation of impurity atoms to the Si surface as a result of pulsed annealing was detected. The spectra of X-ray diffraction in grazing beams and Raman light scattering indicate the formation of InSb phase with a tensile strain level of 0.6–0.7%. Using optical IR spectra, the electron concentration in the layer (2×1020 cm-3) due to the Sb donor impurity was estimated and the formation of an intense absorption band at 3.85 μm was shown. Photoresponse measurements on a diode mesa-structure at 300 K showed a shift in the photosensitivity edge to 1240 nm compared to a standard Si photodiode FD-24.</p></trans-abstract><kwd-group xml:lang="ru"><kwd>кремний</kwd><kwd>антимонид индия</kwd><kwd>наночастица</kwd><kwd>ионная имплантация</kwd><kwd>импульсная ионная обработка</kwd><kwd>плавление</kwd><kwd>кристаллизация</kwd><kwd>оптическое поглощение</kwd><kwd>инфракрасный фотодиод</kwd></kwd-group><kwd-group xml:lang="en"><kwd>silicon</kwd><kwd>indium antimonide</kwd><kwd>nanoparticle</kwd><kwd>ion implantation</kwd><kwd>pulsed ion-beam treatment</kwd><kwd>melting</kwd><kwd>crystallization</kwd><kwd>optical absorption</kwd><kwd>infrared photodiode</kwd></kwd-group><funding-group><funding-statement xml:lang="ru">Работа выполнена при финансовой поддержке Российского научного фонда (проект № 24-29- 00069, https://rscf.ru/project/24-29-00069/).</funding-statement></funding-group></article-meta></front><back><ref-list><title>References</title><ref id="cit1"><label>1</label><citation-alternatives><mixed-citation xml:lang="ru">http://www.matprop.ru/</mixed-citation><mixed-citation xml:lang="en">http://www.matprop.ru/</mixed-citation></citation-alternatives></ref><ref id="cit2"><label>2</label><citation-alternatives><mixed-citation xml:lang="ru">A. 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