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<article article-type="research-article" dtd-version="1.3" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xml:lang="ru"><front><journal-meta><journal-id journal-id-type="publisher-id">zhps</journal-id><journal-title-group><journal-title xml:lang="ru">Журнал прикладной спектроскопии</journal-title><trans-title-group xml:lang="en"><trans-title>Zhurnal Prikladnoii Spektroskopii</trans-title></trans-title-group></journal-title-group><issn pub-type="ppub">0514-7506</issn><publisher><publisher-name>B. I. Stepanov Institute of Physics of the National Academy of Sciences</publisher-name></publisher></journal-meta><article-meta><article-id custom-type="elpub" pub-id-type="custom">zhps-305</article-id><article-categories><subj-group subj-group-type="heading"><subject>Research Article</subject></subj-group><subj-group subj-group-type="section-heading" xml:lang="ru"><subject>***</subject></subj-group><subj-group subj-group-type="section-heading" xml:lang="en"><subject>***</subject></subj-group></article-categories><title-group><article-title>ТРЕХМЕРНЫЙ МИКРОРЕЗОНАТОР, ОСНОВАННЫЙ НА ИСПОЛЬЗОВАНИИ ФОТОАКУСТИЧЕСКОГО СЕНСОРА ДЛЯ ОБНАРУЖЕНИЯ МЕТАНА</article-title><trans-title-group xml:lang="en"><trans-title>A 3D-PRINTED MICRORESONATOR BASED ON THE QUARTZ-ENHANCED PHOTOACOUSTIC SPECTROSCOPY SENSOR FOR METHANE DETECTION</trans-title></trans-title-group></title-group><contrib-group><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Niu</surname><given-names>M. -Sh.</given-names></name><name name-style="western" xml:lang="en"><surname>Niu</surname><given-names>M. -Sh.</given-names></name></name-alternatives><email xlink:type="simple">niumingsheng@126.com</email><xref ref-type="aff" rid="aff-1"/></contrib><contrib contrib-type="author" corresp="yes"><name-alternatives><name name-style="eastern" xml:lang="ru"><surname>Song</surname><given-names>L. -K.</given-names></name><name name-style="western" xml:lang="en"><surname>Song</surname><given-names>L. -K.</given-names></name></name-alternatives><email xlink:type="simple">noemail@neicon.ru</email><xref ref-type="aff" rid="aff-1"/></contrib></contrib-group><aff-alternatives id="aff-1"><aff xml:lang="ru"><institution>Институт лазерных технологий Цюйфунского университета</institution></aff><aff xml:lang="en"><institution>Technology and Laser Institute, Qufu Normal University</institution></aff></aff-alternatives><pub-date pub-type="collection"><year>2018</year></pub-date><pub-date pub-type="epub"><day>10</day><month>03</month><year>2020</year></pub-date><volume>85</volume><issue>4</issue><elocation-id>687(1)-687(6)</elocation-id><permissions><copyright-statement>Copyright &amp;#x00A9; Niu M.-., Song L.-., 2020</copyright-statement><copyright-year>2020</copyright-year><copyright-holder xml:lang="ru">Niu M.-., Song L.-.</copyright-holder><copyright-holder xml:lang="en">Niu M.-., Song L.-.</copyright-holder><license xml:lang="ru" license-type="creative-commons-attribution" xlink:href="https://creativecommons.org/licenses/by/4.0/" xlink:type="simple"><license-p>Данная работа распространяется под лицензией Creative Commons Attribution 4.0.</license-p></license><license xml:lang="en" license-type="creative-commons-attribution" xlink:href="https://creativecommons.org/licenses/by/4.0/" xlink:type="simple"><license-p>This work is licensed under a Creative Commons Attribution 4.0 License.</license-p></license></permissions><self-uri xlink:href="https://zhps.ejournal.by/jour/article/view/305">https://zhps.ejournal.by/jour/article/view/305</self-uri><abstract><p>Разработан трехмерный микрорезонатор, основанный на использовании кварцевой настройки. Его эффективность оценена путем обнаружения метана с помощью волоконно-оптического лазера с распределенной обратной связью. Предельная концентрация метана, обнаруживаемая при атмосферном давлении, средней мощности возбуждающего излучения 8 мВт и постоянной времени усилителя 1 с, что соответствует нормированному коэффициенту шума 5×10- 9  см- 1  ×Вт/Гц1/ 2  , составила 15.6 ppb.. Анализ дисперсии показывает, что система стабильна и может быть основой для портативного газоанализатора. Обсуждаются подходы к улучшению характеристик данного сенсора. Предложенная конструкция экономит время изготовления микрорезонатора. </p></abstract><trans-abstract xml:lang="en"><p>A 3D-printed microresonator based on a quartz tuning fork has been developed. The sensor performance is evaluated by detection of methane with a fiber-coupled distributed feedback diode laser. In combination with wavelength modulation spectroscopy, a minimum detectable concentration of 15.6 ppb by volume is achieved at atmospheric pressure with an 8-mW average optical excitation power and a lock-in amplifier time constant of 1 s, which corresponds to a 1σ normalized noise equivalent absorption coefficient of 5×10- 9  cm- 1 × W/Hz1/ 2  . An Allan variance analysis shows that the system has long-term stability and can serve as the basis for a portable gas analyzer. Approaches to improve the current sensor performance are also discussed. This design greatly reduces the time of manufacturing the microresonator. </p></trans-abstract><kwd-group xml:lang="ru"><kwd>кварцевая фотоакустическая спектроскопия</kwd><kwd>трехмерный микрорезонатор</kwd><kwd>обнаружение метана</kwd><kwd>quartz-enhanced photoacoustic spectroscopy</kwd><kwd>3D-printed microresonator</kwd><kwd>methane detection</kwd></kwd-group></article-meta></front><back><ref-list><title>References</title><ref id="cit1"><label>1</label><citation-alternatives><mixed-citation xml:lang="ru">A. Kosterev, Yu. A. Bakhirkin, R. F. Curl, F. K. Tittel, Opt. Lett., 27, 1902-1904 (2002).</mixed-citation><mixed-citation xml:lang="en">A. Kosterev, Yu. A. Bakhirkin, R. F. Curl, F. K. Tittel, Opt. Lett., 27, 1902-1904 (2002).</mixed-citation></citation-alternatives></ref><ref id="cit2"><label>2</label><citation-alternatives><mixed-citation xml:lang="ru">A. Kosterev, F. K. Tittel, D. V. Serebryakov, A. L. Malinovsky, I. V. Morozov, Rev. Sci. 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