zhpsЖурнал прикладной спектроскопииZhurnal Prikladnoii Spektroskopii0514-7506B. I. Stepanov Institute of Physics of the National Academy of Scienceszhps-501Research Article******ПОЛЯРИЗУЮЩЕЕ ПОКРЫТИЕ, ИЗГОТОВЛЕННОЕ С ИСПОЛЬЗОВАНИЕМ МЕТОДА ШИРОКОПОЛОСНОГО СПЕКТРАЛЬНОГО МОНИТОРИНГАA POLARIZING BEAM SPLITTING COATING FABRICATED WITH THE USE OF THE WAVELENGTH-INDIRECT BROADBAND OPTICAL MONITORING METHODLvQ.LvQ.

Далянь 116023; Далянь 116024

Key Laboratory of Chemical Lasers, Dalian 116023; Dalian 116024

DengS.DengS.

Далянь 116023

Key Laboratory of Chemical Lasers

Dalian 116023

LiCh.LiCh.

Пекин 100864

Beijing 100864

HuangmM.HuangmM.

Далянь 116024

Dalian 116024

LiG.LiG.

Далянь 116023

Key Laboratory of Chemical Lasers

Dalian 116023

lig@dicp.ac.cnJinY.JinY.

Далянь 116023

Key Laboratory of Chemical Lasers

Dalian 116023

Даляньский институт химической физики Китайской АН; Даляньский технологический университетDalian Institute of Chemical Physics, Chinese Academy of Sciences; School of Materials Science & Engineering, Dalian University of TechnologyДаляньский институт химической физики Китайской АНDalian Institute of Chemical Physics, Chinese Academy of SciencesБюро научно-исследовательских программ Китайской АНBureau of Major R&D Programs, Chinese Academy of SciencesДаляньский технологический университетSchool of Materials Science & Engineering, Dalian University of Technology2019180320208661009(1)-1009(7)Copyright © Lv Q., Deng S., Li C., Huangm M., Li G., Jin Y., 20202020Lv Q., Deng S., Li C., Huangm M., Li G., Jin Y.Lv Q., Deng S., Li C., Huangm M., Li G., Jin Y.Данная работа распространяется под лицензией Creative Commons Attribution 4.0.This work is licensed under a Creative Commons Attribution 4.0 License.https://zhps.ejournal.by/jour/article/view/501ионно-лучевое распылениеширокополосный спектральный мониторингполяризующее покрытиеion beam sputteringwavelength-indirect broadband optical monitoringpolarizing beam splittingReferencesB. 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The authors declare that there are no conflicts of interest present.