For citations:

Mukhammad A.I., Gaiduk P.I., Nalivaiko O.Yu., Kolos V.V. IR Transmittance of Si/SiO₂/Si₃N₄/Si Island Structures Formed by Selective Laser Annealing. Zhurnal Prikladnoii Spektroskopii. 2022;89(4):511-518. (In Russ.) https://doi.org/10.47612/0514-7506-2022-89-4-511-518