Influence of oxidative annealing temperature on the structural and optical characteristics of tin oxide films

The results of studies of the crystalline structure and optical characteristics of disordered tin oxide films are presented. Tin oxide films were synthesized by means of magnetron sputtering of a tin target on glass substrate followed by 2-stage annealing in air. The microstructure of tin oxide films was analyzed by X-ray diffraction method and Raman spectroscopy. Transmission spectra of the samples were measured in the wave length range λ = 200–3000 nm. The optical constants of thin tin oxide films depending on the wavelength (refractive index n, absorption coefficient α) were determined using the envelope method. The possibility of synthesis of the tin oxide films with controllably varied optical parameters (absorption coefficient α up to 82 % in the visible range of electromagnetic spectra, refractive index n in the range of 2–2.6, Tauc optical gap in the range of 2.62–3.46 eV) by changing the temperature at the 2nd stage of oxidative annealing in the range of 325–475°C was demonstrated. 

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