For citations:

Filin S.A., Rogalin V.E., Kaplunov I.A. Control of the Optical Surface Purity of the Elements by the Ellipsometric Method. Zhurnal Prikladnoii Spektroskopii. 2022;89(3):410-418. (In Russ.) https://doi.org/10.47612/0514-7506-2022-89-3-410-418