For citations:
Odzhaev V.B., Pyatlitski A.N., Prosolovich V.S., Kovalchuk N.S., Soloviev Ya.A., Zhygulin D.V., Shestovsky D.V., Yankovski Yu.N., Brinkevich D.I. Spectra of Attenuated Total Reflection of Nitrided SiO2/Si Structures. Zhurnal Prikladnoii Spektroskopii. 2022;89(4):498-504. (In Russ.) https://doi.org/10.47612/0514-7506-2022-89-4-498-504
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