For citations:
Brinkevich D.I., Grinyuk E.V., Brinkevich S.D., Prosolovich V.S., Kolos V.V., Zubova O.A., Lastovskii S.B. IR-Fourier Spectroscopy of Photoresist/Silicon Structures for Explosive Lithography. Zhurnal Prikladnoii Spektroskopii. 2023;90(6):863-869. (In Russ.)
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