|Generate QR code
Open Access
Subscription Access
Microstructure and Properties of Thin Zirconium Films Produced by High-Frequency Laser Deposition
Abstract
By the method of high-frequency repetitively pulsed f ~ 6—10 kHz laser radiation with wavelength l = 1.064 μm and power density q = 120 MW/cm2 on zirconium target at a pressure in the vacuum chamber p = 2.2 Pa nanostructured thin films on a silicon substrate have been obtained. The morphology of thin zirconium films has been studied using atomic force microscopy. Transmission spectra of zirconium films have been obtained in the visible, near and mid-IR regions. The electrophysical characteristics of Zr/Si structures are analyzed.
About the Authors
N. A. Bosak
B. I. Stepanov Institute of Physics of the National Academy of Sciences of Belarus
Belarus
Belarus
Minsk
A. N. Chumakov
B. I. Stepanov Institute of Physics of the National Academy of Sciences of Belarus
Belarus
Belarus
Minsk
L. V. Baran
Belarusian State University
Belarus
Belarus
Minsk
V. V. Malyutina-Bronskaya
SSPA “Optics, Optoelectronics, and Laser Technology
Belarus
Belarus
Minsk
M. Ivkovich
Institute of Physics
Serbia
Serbia
Belgrade
N. Sakan
Institute of Physics
Serbia
Serbia
Belgrade
A. A. Ivanov
B. I. Stepanov Institute of Physics of the National Academy of Sciences of Belarus
Belarus
Belarus
Minsk
References
1. Л. М. Лыньков, Т. В. Молодечкина, В. А. Богуш, Т. В. Борботько. Докл. БГУИР, № 3 (2004) 73—84
2. Xu Jingping, Bai Tiecheng, Li Xingjiao, Zheng Xiangbin, Su Wuda, An Changwu. Vacuum, 43, N 11 (1992) 1051—1053
3. Н. Е. Некрасова, С. С. Кругликов. Физикохимия поверхности и защита материалов, 47, № 6 (2011) 668—672
4. С. В. Иванова, Э. М. Глаговский, В. К. Орлов, И. А. Шлепов, К. Ю. Никоноров, В. В. Рожко, В. А. Глебов, С. Я. Бецофен. Ядерная физика и инжиниринг, 2, № 3 (2011) 224—234
5. D. G. Olmedo, D. R. Tasat, P. Evelson, R. Rebagliatti, M. B. Guglielmotti, R. L. Cabrini. J. Biomed. Mater. Res. A, 98A, N 4 (2011) 604—613
6. R. H. Nielsen, J. H. Schlewitz, H. Neilson. Kirk-Othmer Encycl. Chem. Technol. (2000) 1—46
7. S. Q. Hussain, S. Kim, S. Ahn, N. Balaji, Y. Lee, J. H. Lee, J. Yi. Solar Energy Mater. Solar Cells, 122 (2014) 130—135
8. B. Zhang, X. Dong, X. Xu, P. Zhao, J. Wu. Solar Energy Mater. Solar Cells, 92, N 10 (2008) 1224—1229
9. D. A. Aldemir. Modern Phys. Lett. B, 34, N 10 (2020) 2050095
10. E. H. Rhoderick. IEE Proc. I, Solid-State Electron. Dev., 129, N 1 (1982) 1—4
11. Л. Я. Минько, А. Н. Чумаков, Н. А. Босак. Квант. электрон., 17, № 11 (1990) 1480—1484
Review
For citations:
Bosak N.A., Chumakov A.N., Baran L.V., Malyutina-Bronskaya V.V., Ivkovich M., Sakan N., Ivanov A.A. Microstructure and Properties of Thin Zirconium Films Produced by High-Frequency Laser Deposition. Zhurnal Prikladnoii Spektroskopii. 2023;90(6):877-881. (In Russ.)
Views: 156
Email this article 