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SURFACE MORPHOLOGY, OPTICAL AND ELECTROPHYSICAL PROPERTIES OF PIEZOCERAMIC FILMS OBTAINED BY LASER DEPOSITION IN VACUUM
Abstract
By the method of high-frequency repetitively pulsed f ~ 10–12 kHz laser radiation with wavelength λ = 1.064 μm and power density q = 33 MW/cm2 on the piezoceramics PZT-19 target at pressure in the vacuum chamber p = 2.2 * 10–2 mm Hg nanostructured thin films on a silicon and glass substrates have been obtained. The morphology of thin piezoceramics films was studied using atomic force microscopy. Transmission spectra of the obtained films were investigated in the visible, near and mid-IR regions. The electrophysical characteristics of piezoceramics on Si structures are analyzed.
About the Authors
N. A. Bosak
B. I. Stepanov Institute of Physics of the National Academy of Sciences of Belarus
Belarus
Belarus
Minsk
M. V. Bushinsky
SSPA “Scientific and Practical Center of the National Academy of Sciences of Belarus for Materials Science”
Belarus
Belarus
Minsk
A. N. Chobot
SSPA “Scientific and Practical Center of the National Academy of Sciences of Belarus for Materials Science”
Belarus
Belarus
Minsk
L. V. Baran
Belarusian State University
Belarus
Belarus
Minsk
V. V. Malyutina-Bronskaya
SSPA “Optics, Optoelectronics and Laser Technology”
Belarus
Belarus
Minsk
I. A. Taratyn
Belarusian National Technical University
Belarus
Belarus
Minsk
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Review
For citations:
Bosak N.A., Bushinsky M.V., Chobot A.N., Baran L.V., Malyutina-Bronskaya V.V., Taratyn I.A. SURFACE MORPHOLOGY, OPTICAL AND ELECTROPHYSICAL PROPERTIES OF PIEZOCERAMIC FILMS OBTAINED BY LASER DEPOSITION IN VACUUM. Zhurnal Prikladnoii Spektroskopii. 2025;92(1):59-64. (In Russ.)
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