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Thin-Film Coating with Reduced Optical Reflection Coefficient Based on Germanium Nanoporous Layer
Abstract
A method for producing a coating with a reduced optical reflectivity coefficient based on nanoporous Ge layers by implantation of monocrystalline c-Ge with 209Bi++ ions at an energy of E = 72 keV, a current density of J = 5 μA/cm2 and a dose interval of D = 1.3 ꞏ 1015—2.5 ꞏ 1016 ion/cm2 is proposed. It is found that starting from D = 6.2 ꞏ 1015 ion/cm2, an swelling spongy Bi:PGe layer with a thickness of about 100 nm is formed. This layer consists of thin intertwined Ge nanowires, which does not change morphological features with the increasing of values D. The layer is characterized by a low optical reflectivity coefficient (< 3%) in the visible spectral range.
About the Authors
A. L. Stepanov
Zavoisky Physical-Technical Institute, FRC “Kazan Scientific Center of RAS”
Russian Federation
Russian Federation
Kazan
A. M. Rogov
Zavoisky Physical-Technical Institute, FRC “Kazan Scientific Center of RAS”
Kazan
V. F. Sotnikova
Zavoisky Physical-Technical Institute, FRC “Kazan Scientific Center of RAS”
Kazan
V. F. Valeev
Zavoisky Physical-Technical Institute, FRC “Kazan Scientific Center of RAS”
Kazan
V. I. Nuzhdin
Zavoisky Physical-Technical Institute, FRC “Kazan Scientific Center of RAS”
Kazan
D. A. Konovalov
Zavoisky Physical-Technical Institute, FRC “Kazan Scientific Center of RAS”
Kazan
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For citations:
Stepanov A.L., Rogov A.M., Sotnikova V.F., Valeev V.F., Nuzhdin V.I., Konovalov D.A. Thin-Film Coating with Reduced Optical Reflection Coefficient Based on Germanium Nanoporous Layer. Zhurnal Prikladnoii Spektroskopii. 2025;92(5):674-678. (In Russ.)
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