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Changes of Thickness and Optical Constants of Boron Oxide Films During Heating on Air
Abstract
The thickness and optical constants changes of boron oxide films deposited on substrates of sapphire glass, sitall, and polycrystalline massive aluminum were studied directly during heating on air in the temperature range of 24–700°C using single-wave and spectral ellipsometry methods. The high hygroscopicity of these films was demonstrated, which decreases upon their preliminary annealing. It was shown that a continuous decrease of the film thickness occurs in the studied temperature range. In the temperature range up to 300°C, it is due to dehydration processes. At higher temperatures, the decrease in the film thickness is explained by the slow evaporation of boric acid formed in the film. It was shown that the deposition of a boron oxide film on the aluminum surface does not affect the rate of its oxidation.
About the Authors
L. A. Akashev
Institute of Solid State Chemistry, Ural Branch of the Russian Academy of Sciences
Russian Federation
Russian Federation
Ekaterinburg
N. A. Popov
Institute of Solid State Chemistry, Ural Branch of the Russian Academy of Sciences
Russian Federation
Russian Federation
Ekaterinburg
V. G. Shevchenko
Institute of Solid State Chemistry, Ural Branch of the Russian Academy of Sciences
Russian Federation
Russian Federation
Ekaterinburg
E. V. Spesivtsev
A.V. Rzhanov Institute of Semiconductor Physics, Siberian Branch of RAS
Russian Federation
Russian Federation
Novosibirsk
O. G. Reznitskih
Institute of Solid State Chemistry, Ural Branch of the Russian Academy of Sciences
Russian Federation
Russian Federation
Ekaterinburg
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Review
For citations:
Akashev L.A., Popov N.A., Shevchenko V.G., Spesivtsev E.V., Reznitskih O.G. Changes of Thickness and Optical Constants of Boron Oxide Films During Heating on Air. Zhurnal Prikladnoii Spektroskopii. 2025;92(3):318-325. (In Russ.)
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