A POLARIZING BEAM SPLITTING COATING FABRICATED WITH THE USE OF THE WAVELENGTH-INDIRECT BROADBAND OPTICAL MONITORING METHOD
Abstract
We present a testing method based on the use of wavelength-indirect broadband optical monitoring. A polarizing beam splitting (PBS) coating applied at a wavelength of 1550 nm at an incidence angle of 45° was designed. The optimized coating structure contained 59 non-quarter-wave (QW) layers. Preproduction error analysis was used to estimate the advantages of the application of wavelength-indirect broadband optical monitoring. Then, we deposited the PBS coating with an optimized monitoring strategy by ion beam sputtering (IBS). Finally, reverse engineering of the produced PBS coatings was executed. The experimental results show that a good agreement between the theoretical target and the measured transmittance is obtained, the maximum error in the first and last two layers is about 10%, and the minimum error is only about 0.01%.
About the Authors
Q. Lv
Dalian Institute of Chemical Physics, Chinese Academy of Sciences; School of Materials Science & Engineering, Dalian University of Technology
China
Key Laboratory of Chemical Lasers, Dalian 116023; Dalian 116024
China
Key Laboratory of Chemical Lasers, Dalian 116023; Dalian 116024
S. Deng
Dalian Institute of Chemical Physics, Chinese Academy of Sciences
China
China
Key Laboratory of Chemical Lasers
Dalian 116023
Ch. Li
Bureau of Major R&D Programs, Chinese Academy of Sciences
China
Beijing 100864
China
Beijing 100864
M. Huangm
School of Materials Science & Engineering, Dalian University of Technology
China
Dalian 116024
China
Dalian 116024
G. Li
Dalian Institute of Chemical Physics, Chinese Academy of Sciences
China
China
Key Laboratory of Chemical Lasers
Dalian 116023
Y. Jin
Dalian Institute of Chemical Physics, Chinese Academy of Sciences
China
China
Key Laboratory of Chemical Lasers
Dalian 116023
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Review
For citations:
Lv Q., Deng S., Li Ch., Huangm M., Li G., Jin Y. A POLARIZING BEAM SPLITTING COATING FABRICATED WITH THE USE OF THE WAVELENGTH-INDIRECT BROADBAND OPTICAL MONITORING METHOD. Zhurnal Prikladnoii Spektroskopii. 2019;86(6):1009(1)-1009(7).
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