For citations:

Brinkevich S.D., Grinyuk E.V., Brinkevich D.I., Sverdlov R.L., Prosolovich V.S., Pyatlitski A.N. MECHANISM OF ADHESIVE INTERACTION OF DIAZOQUINONE-NOVOLAC PHOTORESIST FILMS WITH MONOCRYSTALLINE SILICON. Zhurnal Prikladnoii Spektroskopii. 2020;87(4):589-594. (In Russ.)