DETERMINATION OF OPTICAL CHARACTERISTICS OF PARALLEL-SIDED QUARTZ PLATES AT BREWSTER ANGLES BY SPECTRAL ELLIPSOMETRY
Abstract
A method is proposed for determining the optical characteristics of glass plates after physicochemical surface treatment, based on measuring the spectra of ellipsometric angles at incidence angles equal to the Brewster angle. It is found that from the coordinates of the minima on the spectra of ellipsometric angles, one can determine the dispersion dependence of the refractive index and estimate the thickness of the surface layers during the process of the plate manufacturing. The refractive index spectra calculated by the Brewster formula for KU-1 optical quartz plates in the region with no absorption are in satisfactory agreement with the spectra determined by known numerical methods using the DeltaPsi2 software of the UVISEL 2 spectral ellipsometer (Нoriba). The relative error in determining the refractive indices of the quartz plates by the proposed method does not exceed 0.1%.
About the Authors
N. I. Staskov
A. A. Kuleshov Mogilev State University
Belarus
Mogilev, 212022
Belarus
Mogilev, 212022
A. A. Mohammedmuradov
A. A. Kuleshov Mogilev State University
Belarus
Mogilev, 212022
Belarus
Mogilev, 212022
N. A. Krekoten
“Integral” Joint Stock Company
Belarus
Minsk
Belarus
Minsk
S. O. Parashkov
Belarusian-Russian University
Belarus
Mogilev
Belarus
Mogilev
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Review
For citations:
Staskov N.I., Mohammedmuradov A.A., Krekoten N.A., Parashkov S.O. DETERMINATION OF OPTICAL CHARACTERISTICS OF PARALLEL-SIDED QUARTZ PLATES AT BREWSTER ANGLES BY SPECTRAL ELLIPSOMETRY. Zhurnal Prikladnoii Spektroskopii. 2020;87(1):122-129. (In Russ.)
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