For citations:

Brinkevich S.D., Brinkevich D.I., Prosolovich V.S., Lastovskii S.B., Pyatlitski A.N. Frustrated total internal reflection spectra of diazoquinone-novolac photoresist films. Zhurnal Prikladnoii Spektroskopii. 2020;87(6):941-948. (In Russ.)