An improved target method to quantitatively measure the lateral resolution of the confocal Raman microscope
Abstract
The lateral resolution is one of the most important hallmarks for evaluating the imaging performance of a confocal Raman microscope (CRM). A method based on the resolution test chart for testing the lateral resolution of the CRM was proposed. The test imaging target comprised a polished silicon substrate coated with a thin metallic pattern, which provided a high contrast and negligible edge effects. By using a singlebar target instead of a conventional three-bar target, quantitative measurements of the lateral resolution of the CRM were possible. Single-bar targets with different widths were used to test a CRM with a nominal lateral resolution of approximately 1 μm. The response of the C'RM to the single-bar target was studied further with a theoretical model, and the relationship between the Michelson contrast of the response function and the lateral resolution was investigated. Finally, the method used to calculate the lateral resolution was described and tested and shown to have a relative repeatability of only 5.6%, which is ideal for resolution testing. Overall, our experimental results showed excellent agreement with simulation results and proved that the single-bar target method was capable of measuring the lateral resolution of CRMs with high accuracy, efficiency and reproducibility.
Supporting agencies: The research was supported by the National Key Research and Development Program of China (2016YFF0201005).
About the Authors
X. Ding
National Institute of Metrology
China
China
Xiang Ding.
Beijing 100029.
Y. Fu
National Institute of Metrology
China
China
Yanxhe Fu.
Beijing 100029.
F. Li
National Institute of Metrology
China
China
Fei Li.
Beijing 100029.
J. Zhang
National Institute of Metrology
China
China
Jiyan Zhang.
Beijing 100029.
W. Liu
National Institute of Metrology
China
China
Wenli Liu.
Beijing 100029.
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Review
For citations:
Ding X., Fu Y., Li F., Zhang J., Liu W. An improved target method to quantitatively measure the lateral resolution of the confocal Raman microscope. Zhurnal Prikladnoii Spektroskopii. 2020;87(6):977-983.
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