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Influence of Helium Ion Implantation on Optical Properties of Fused Silica
Abstract
High-purity fused silica has been implanted with 60-keV helium ions at the fluence of 1.5 • 1017 cm-2. The effects of helium-ion implantation on optical properties of silica samples before and after helium implantation have been investigated by infrared (IR), photoluminescence (PL), and ultraviolet-visible (UV-vis) spectrophotometer. After helium-ion implantation, X-ray photoelectron spectroscopy (XPS) results indicate that Si 2p peak is shifted to higher binding energy. An obvious PL band at 500 nm is observed, and the PL intensity is significantly decreased. However, the intensity of IR and optical absorption is increased greatly by ion implantation. A mechanism for the effects of helium implantation on optical properties of fused silica is discussed.
Keywords
helium-ion implantation,
fused silica,
photoluminescence,
X-ray photoelectron spectroscopy,
infrared,
ultraviolet-visible spectrophotometer
Supporting agencies: This work was supported by the National Natural Science Foundation of China (Grant No. U1830204), National Key R&D Program of China (Grant No. 2018YFC0809500), Key Project of Sichuan Department of Science and Technology (Grant No. 2018GZ0497), and project of Civil Aviation Flight University of China (Grant Nos. BJ2016-04, J2018-56, and CJ2019-01). The authors would like to thank Let Pub for its linguistic assistance during the preparation of this manuscript
About the Authors
M. Zhong
Aviation Engineering Institute at Civil Aviation Flight University of China
China
China
Guanghan 618307
J. H. Li
Aviation Engineering Institute at Civil Aviation Flight University of China
China
China
Guanghan 618307
B. Li
School of Physics at University of Electronic Science and Technology of China
China
China
Chengdu 610054
C. X. Tian
School of Physics at University of Electronic Science and Technology of China
China
China
Chengdu 610054
X. Xiang
School of Physics at University of Electronic Science and Technology of China
Russian Federation
Russian Federation
Chengdu 610054
C. Zhou
Key Laboratory of Flight Techniques and Flight Safety, CAAC, Civil Aviation Flight University of China
China
China
Guanghan 618307
W. F. Yang
Aviation Engineering Institute at Civil Aviation Flight University of China
Russian Federation
Russian Federation
Guanghan 618307
Review
For citations:
Zhong M., Li J.H., Li B., Tian C.X., Xiang X., Zhou C., Yang W.F. Influence of Helium Ion Implantation on Optical Properties of Fused Silica. Zhurnal Prikladnoii Spektroskopii. 2021;88(2):197-201.
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