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Influence of the composition of the radio-frequency sputtering atmosphere on the density of states and interband light absorption in thin Y2O3 films
https://doi.org/10.47612/0514-7506-2021-88-6-881-886
Abstract
The long-wavelength edge of the fundamental absorption band of thin Y2O3 films obtained by radiofrequency ion-plasma sputtering is investigated. The edge of interband absorption after annealing of the films in an atmosphere of argon, oxygen, or a mixture of these gases is shown to be approximated well by the Urbach empirical rule. Diffractograms of the obtained films were studied and a model of a heavily doped or defective semiconductor in the quasi-classical approximation was used to analyze the experimental results. This model allows determining the radius of the basic electronic state, the screening radius, and the rootmean-square potential depending on the sputtering atmosphere.
About the Authors
O. M. Bordun
Ivan Franko L’viv National University
Russian Federation
Russian Federation
L’viv
I. O. Bordun
Ivan Franko L’viv National University
Russian Federation
Russian Federation
L’viv
I. M. Kofliuk
Ivan Franko L’viv National University
Russian Federation
Russian Federation
L’viv
I. Yo. Kukharskyy
Ivan Franko L’viv National University
Russian Federation
Russian Federation
L’viv
I. I. Medvid
Ivan Franko L’viv National University
Russian Federation
Russian Federation
L’viv
References
1. X. Yu, T. J. Marks, A. Facchetti. Nature Mater., 15, N 4 (2016) 383—396
2. N. Koslowski, R. C. Hoffmann, V. Trouillet, M. Bruns, S. Foro, J. J. Schneider. RSC Adv., 9 (2019) 31386—31397
3. K. Vini, Ch. Adukkathayar Aparna, K. M. Nissamudeen. Eur. Phys. J. Appl. Phys., 89, N 3 (2020) 30301
4. L. Mariscal-Becerra, R. Vazquez-Arreguin, U. Balderas, S. Carmona-Tellez, H. Murrieta Sanchez, C. Falcony. J. Appl. Phys., 121, N 12 (2017) 125111
5. W. Wang, P. Zhu. Opt. Express, 26, N 26 (2018) 34820—34829
6. Е. В. Берлин, Л. А. Сейдман. Ионно-плазменные процессы в тонкопленочной технологии, Москва, Техносфера (2010).
7. O. M. Bordun, I. O. Bordun, I. I. Kukharskyi, I. I. Medvid, Zh. Ia. Tsapovska, D. S. Leonov. Nanosist., Nanomater., Nanotehnol., 17, N 2 (2019) 353—360
8. O. M. Bordun, I. O. Bordun, I. Yo. Kukharskyy. J. Appl. Spectr., 82, N 3 (2015) 390—395]
9. M. V. Kurik. Phys. Status Solidi A, 8, N 1 (1971) 9—45
10. Е. Джонсон. Оптические свойства полупроводников. Полупроводниковые соединения типа А3В5, под ред. Р. Уиллардсона, А. Бира, Москва, Мир (1970) 166—277
11. C. de Mayrinck, R. L. Siqueira, J. Esbenshade, M. A. Schiavon, R. C. de Lima, H. P. Barbosa, S. J. L. Ribeiro, J. L. Ferrari. J. Alloys Compound., 816 (2020) 152591
12. H. Kajikawa, Y. Fukumoto, S. Hayashi, K. Shibutani, R. Ogawa, Y. Kawate. IEEE Transact. Magn., 27, N 2 (1991) 1422—1425
13. Г. Бетц, Г. Венер. Распыление твердых тел ионной бомбардировкой, под ред. Р. Бериша, 2, Москва, Мир (1986) 24—133 [
14. K. Meyer, I. K. Schuller, C. M. Faiko. J. Appl. Phys., 52, N 9 (1981) 5803—5805
15. H.Mase, T. Tanabe, G. Miyamoto. J. Appl. Phys., 50, N 5 (1979) 3684—3686
16. Ch. Park, M. Bujor, H. Poppa. Thin Solid Films, 113 (1984) 337—344
17. А. Л. Эфрос. Успехи физ. наук, 111 (1973) 451—482
18. O. M. Bordun, I. O. Bordun, I. Yo. Kukharskyy. J. Appl. Spectr., 79, N 6 (2013) 982—987
19. Н. Д. Довга. Физ. электрон., № 33 (1986) 86—88
20. O. M. Bordun, B. O. Bordun, I. Yo. Kukharskyy, I. I. Medvid. J. Appl. Spectr., 88, N 2 (2021) 257—260]
Review
For citations:
Bordun O.M., Bordun I.O., Kofliuk I.M., Kukharskyy I.Y., Medvid I.I. Influence of the composition of the radio-frequency sputtering atmosphere on the density of states and interband light absorption in thin Y2O3 films. Zhurnal Prikladnoii Spektroskopii. 2021;88(6):881-886. (In Russ.) https://doi.org/10.47612/0514-7506-2021-88-6-881-886
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